P-170 Stylus Profiler

Product image of the P-170 Surface Profiler
Product image of the P-170 Surface Profiler
3D graph of MESA step height
3D graph of 100nm gate recess
3D graph of a copper pillar
3D graph of step height alignment targets

P-170 Stylus Profiler

The P-170 is a cassette-to-cassette profiler offering step height measurement capability for steps from a few nanometers to one millimeter, for production environments. The system supports 2D and 3D measurements of step heights, roughness, bow, and stress for scans up to 200mm without stitching. The P-170 has advanced pattern recognition algorithms, enhanced optics, and an advanced stage for robust performance and seamless recipe transportability between systems – a key requirement for a 24x7 production environment.

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